4  ASML Operational Data

In the following sections, you will find data concerning ASML’s operations, including machines, parts, suppliers, customers, and transportation logistics.

4.1 Systems

ASML’s photolithography machines are among the most complex machines in the world, comprising tens of thousands of components. The key products and services offered by ASML are (ASML 2025a):

  • EUV Lithography Systems: Extreme ultraviolet lithography systems that provide the highest resolution in high-volume manufacturing, enabling chipmakers to produce cutting-edge chips with more transistors on a single chip. EUV systems are subdivided into (see “ASML EUV Lithography Systems” 2025):
    • EXE systems, which are the latest generation of EUV machines designed featuring high numerical aperture (NA) optics for improved resolution and performance.
    • NXE systems, which are designed for high-volume manufacturing and support advanced packaging technologies.
  • DUV Lithography Systems: Deep ultraviolet lithography systems that are the cornerstone of the semiconductor industry, used for high-volume manufacturing of advanced Logic and Memory chips. DUV systems are subdivided into:
    • Immersion systems, which use a liquid medium to improve resolution and are widely used in advanced chip manufacturing.
    • Dry systems, which are used for less advanced chips and legacy processes.
  • Refurbished Systems: ASML refurbishes older PAS 5500 lithography systems for continued use in customer fabs, extending their lifespan and competitiveness (“Refurbished Systems” 2025). Not all chips require the latest technology, and many fabs still operate older machines that are cost-effective for their needs. These systems are often retrofitted with new optics and lasers to maintain performance.

Besides machines, ASML also provides:

  • Metrology and Inspection Systems: Equipment to ensure the quality and precision of semiconductor manufacturing processes, covering every step from R&D to mass production.
  • Software Solutions: Computational lithography software that optimizes the design and manufacturing processes, enhancing the performance and yield of semiconductor devices.

Figure 4.1 shows one of ASML’s latest EUV machine, the TWINSCAN EXE:5000. Weighing 165 tons and costing around $400 million, this machine is designed for the next generation of chips, with a resolution of 13.5 nm and a throughput of 170 wafers per hour.

Table 4.1 provides a comprehensive list of ASML machines.

Figure 4.1: ASML’s TWINSCAN EXE:5000 (Image: ASML), one of the latest High-NA EUV machines. Weighing 165 tons, it required seven partially loaded Boeing 747s (cargo planes) to transport the system from Veldhoven to Seattle. The shipment included more than 250 crates packed into 43 freight containers. 20 trucks transported the system to Intel’s facility in Hillsboro, Oregon. Installing the system required 250 engineers, and six months to complete (Tarasov 2025; Mat Honanarchive and James O’Donnellarchive 2024).
Table 4.1: ASML Lithography Machines (download).
System Introduction year Type Light source / wavelength (KrF, ArF, EUV) Projection optics (NA / design)
“TWINSCAN EXE:5200B” (2025) 2025 EUV EUV, 13.5 nm wavelength 0.55-NA anamorphic reflective optics
“TWINSCAN XT:400M” (2025) 2025 DUV i-line (Hg) 365 nm 0.65-NA lens
“TWINSCAN EXE:5000” (2024) 2024 EUV EUV, 13.5 nm wavelength 0.55-NA anamorphic reflective optics (High-NA EUV)
“TWINSCAN NXE:3800E” (2024) 2024 EUV EUV, 13.5 nm 0.33-NA reflective optics
“TWINSCAN NXT:870” (2022) 2022 DUV KrF, 248 nm Variable 0.80-NA refractive lens
“TWINSCAN NXT:870B” (2022) 2022 DUV KrF, 248 nm Variable 0.80-NA lens
“TWINSCAN NXE:3600D” (2021) 2021 EUV EUV, 13.5 nm 0.33-NA reflective optics
“TWINSCAN XT:860N” (2021) 2021 DUV KrF, 248 nm Variable NA 0.55–0.80 lens
“TWINSCAN NXE:3400C” (2019) 2019 EUV EUV, 13.5 nm 0.33-NA reflective optics
“TWINSCAN NXT:2050i” (2019) 2019 DUV ArF immersion, 193 nm 1.35-NA catadioptric lens
“NXT:2150i” (2018) 2018 DUV ArF immersion, 193 nm 1.35-NA lens
“TWINSCAN NXE:3400B” (2017) 2017 EUV EUV, 13.5 nm 0.33-NA reflective 4× reduction optics
“NXT:2100i” (2017) 2017 DUV ArF immersion, 193 nm 1.35-NA lens
“NXT:1980Fi” (2016) 2016 DUV ArF immersion, 193 nm 1.35-NA lens
“TWINSCAN NXT:2000i” (2015) 2015 DUV ArF immersion, 193 nm 1.35-NA lens
“TWINSCAN NXT:1470” (2013) 2013 DUV ArF dry, 193 nm Variable NA 0.70–0.93 Carl Zeiss Starlith lens
“TWINSCAN XT:1460K” (2008) 2008 DUV ArF, 193 nm Variable NA 0.65–0.93 projection lens
“TWINSCAN XT:1060K” (2006) 2006 DUV KrF, 248 nm 0.93-NA catadioptric lens (4× reduction)
“TWINSCAN XT:860M” (2021) 2005 DUV KrF, 248 nm Variable NA 0.55–0.80 lens
PAS 5500/1150C (2019) 2004 ArF 193 nm ArF 0.50–0.75 NA
PAS 5500/8TFH-a (2019) 2003 KrF 248 nm KrF 0.55–0.80 NA (variable)
PAS 5500/850C (2019) 2002 DUV 248 nm KrF 0.55–0.80 NA (variable)
PAS 5500/750F (2019) 2000 DUV 248 nm KrF 0.5–0.7 NA (variable)
PAS 5500/450F (2019) 1998 i-Line 365 nm i-line 0.48–0.65 NA
PAS 5500/275D (2019) 1997 i-Line 365 nm i-line 0.48–0.60 NA (variable)
PAS 5500/350C (2019) 1996 KrF 248 nm KrF 0.40–0.63 NA
PAS 5500/100D (2019) 1995 i-Line 365 nm i-line 0.48—0.60 NA (variable)

4.2 Lithography Machine Lifecycle

ASML’s lithography machines undergo a complex lifecycle involving multiple stages from manufacturing to installation at customer sites. The key stages include (Tarasov 2022, 2025; Bloomberg News 2024):

  • Module Manufacturing: Components are produced at specialized ASML facilities or by key suppliers, such as Carl Zeiss for optics and Trumpf for lasers.
  • Assembly and Testing: After manufacturing, modules are shipped to Veldhoven, where they are assembled into a complete machine and tested in a cleanroom to ensure optimal performance. The machine is then disassembled into modules for final shipment.
  • Global Shipment: Modules are packed in specialized containers to maintain precise environmental conditions, such as temperature and vibration control.
  • On-Site Installation: At the customer’s fabrication facility, over 250 engineers work for approximately six months to reassemble the modules with nanoscale precision.
  • Maintenance and Support: Post-installation, ASML provides ongoing maintenance and support services to ensure optimal performance and minimize downtime.

4.3 Machine Types

ASML’s scanners are grouped by platform families that reflect the light source, numerical aperture, and generation of the TWINSCAN architecture. In this document we use the following families, ordered from legacy DUV to the newest High-NA EUV.

  • PAS. Legacy steppers and early step-and-scan systems for DUV. Primarily i-line \(365,\text{nm}\) and KrF \(248,\text{nm}\), with some ArF \(193,\text{nm}\) variants. Common in 200 mm (8-inch) wafer fabs, still relevant for mature nodes and specialty processes.
  • NXT. Modern high-productivity DUV on the TWINSCAN platform. Includes ArF immersion \(193,\text{nm}\) (\(\text{NA}\approx1.35\)) for critical layers and KrF \(248,\text{nm}\) dry for non-critical layers. Designed for 300 mm high-volume manufacturing and mix-and-match with EUV.
  • NXE. EUV \(13.5,\text{nm}\) scanners with reflective optics and \(\text{NA}=0.33\). Workhorse for advanced nodes, enabling single-exposure EUV on 7 nm, 5 nm, 3 nm and beyond with high throughput and tight overlay.
  • EXE. Next-generation High-NA EUV \(13.5,\text{nm}\) with \(\text{NA}=0.55\) and anamorphic optics. Targets single-exposure patterning at smaller pitches and enables further design-rule scaling for the most advanced logic and memory processes.

Each machine type includes two equipment areas that matter for parts and layout:

  • Scanner. The main lithography tool installed on the production floor. This includes all components directly integrated into the tool, such as the tool frame, projection and illumination optics, wafer and reticle stages, on-tool control racks, sensors, cabling, and enclosures.
  • Sub-fab. The dedicated equipment area located directly beneath the production floor, housing the tool’s auxiliary systems. This includes vacuum pumps, boosters, abatement systems, power modules, cooling and DI-water skids, vibration-isolation frames, and manifolds that are exclusively used by the tool.
Figure 4.2: Scanner and sub-fab in ASML lithography machine (LaPedus 2016)

Table 4.2 provides an overview of the volumes of ASML machine types, considering their two primary equipment areas: the scanner and the sub-fab. These values represent averages across different configurations within each machine type. For instance, the TWINSCAN EXE 5000, depicted in Figure 4.3, is comparable in size to a double-decker bus.

Table 4.2: Volumes (in m³) of ASML machine types considering their equipment areas. The values represent average across different configurations within each machine type.
L (m) W (m) H (m) Volume (m³)
type category
PAS Scanner 2.8 2.30 2.4 15.46
Sub-fab 2.8 2.30 2.8 18.03
NXT Scanner 5.2 2.60 3.1 41.91
Sub-fab 5.2 2.60 3.4 45.97
NXE Scanner 6.0 4.50 3.8 102.60
Sub-fab 6.0 4.50 3.8 102.60
EXE Scanner 12.0 2.55 4.0 122.40
Sub-fab 12.0 2.55 2.0 61.20
Figure 4.3: Twinscan EXE 5000 (ASML)

Table 4.2 shows the number of parts per machine type and service area category.

Table 4.3: Number of parts per ASML machine type and service area (scanner and sub-fab).
machine_type platform n_parts_scanner n_parts_sub_fab n_parts_total
0 TWINSCANEXE5200B EXE 82234 51192 133426
1 TWINSCANXT400M NXT 39944 17275 57220
2 TWINSCANEXE5000 EXE 73098 50484 123582
3 TWINSCANNXE3800E NXE 63402 41335 104738
4 TWINSCANNXT870 NXT 38467 15796 54263
5 TWINSCANNXT870B NXT 40192 17141 57334
6 TWINSCANNXE3600D NXE 63207 44367 107575
7 TWINSCANXT860N NXT 39399 15791 55191
8 TWINSCANNXE3400C NXE 64161 39986 104147
9 TWINSCANNXT2050i NXT 40191 16458 56649
10 NXT2150i NXT 38144 15938 54082
11 TWINSCANNXE3400B NXE 66851 41675 108526
12 NXT2100i NXT 37675 16209 53884
13 NXT1980Fi NXT 39524 16801 56326
14 TWINSCANNXT2000i NXT 39294 16855 56149
15 TWINSCANNXT1470 NXT 42622 16164 58787
16 TWINSCANXT1460K NXT 37513 15828 53342
17 TWINSCANXT1060K NXT 39685 17431 57117
18 TWINSCANXT860M NXT 38280 15806 54087
19 PAS55001150C PAS 18983 2271 21255
20 PAS55008TFHa PAS 20535 2259 22795
21 PAS5500850C PAS 19141 2225 21366
22 PAS5500750F PAS 19915 2224 22139
23 PAS5500450F PAS 20662 2224 22887
24 PAS5500275D PAS 20472 2207 22679
25 PAS5500350C PAS 20086 2269 22355
26 PAS5500100D PAS 18357 2164 20522

4.4 Factories

ASML’s factories are the backbone of its manufacturing and assembly operations. The main factories are located in:

  • Veldhoven (Netherlands): The primary manufacturing site for EUV and DUV systems, where the most advanced machines are assembled and tested.
  • Tainan/Linkou (Taiwan): Focuses on high-volume DUV production and module assembly for the Asia-Pacific region.
  • Wilton (Connecticut, US): Manufactures optics and modules, supporting North American customers.
  • San Diego (California, US): Produces light sources via Cymer, which are critical for EUV machines.
  • Berlin (Germany): Specializes in optics and modules, particularly for EUV systems.

For example, the TWINSCAN EXE:5000, ASML’s latest High-NA EUV machine, comprises four modules, manufactured in Connecticut, California, Germany, and the Netherlands. The machine is assembled in Veldhoven, Netherlands, for testing and approval before being disassembled again for shipment to customers (Tarasov 2025).

Factories are sourced with components from more than 5,000 suppliers, being the first step in the supply chain before parts flow to central warehouses and then to local warehouses for customer delivery.

All machines are sent to the Veldhoven (EUV and DUV) or Tainan/Linkou (DUV) factories for assembly and testing before being shipped to customers. The factories are equipped with cleanrooms to ensure the precision required for lithography machines.

US and German factories are auxiliary sites that support the main operations in the Netherlands and Taiwan, focusing on specific components like optics and light sources.

Table 4.4 provides a list of ASML factories.

Table 4.4: ASML factories (download).
Factory_Name Address Latitude Longitude
Factory_ID
ASML-F-01 ASML Veldhoven (Netherlands) Factory De Run 6501, 5504 DR, Veldhoven, The Netherlands 51.4167 5.4750
ASML-F-02 ASML Berlin (Germany) Factory Waldkraiburger Straße 5, 12347, Berlin, Germany 52.4269 13.4899
ASML-F-03 ASML Linkou (Taiwan) Factory No. 59, Keji 6th Rd., Hwa-Ya Technology Park, ... 25.0600 121.2200
ASML-F-04 ASML Tainan (Taiwan) Factory No. 9, Dali 1st Rd., Xinshi Dist., Tainan City... 23.0900 120.3000
ASML-F-05 ASML San Diego (United States) Factory 17075 Thornmint Court, San Diego, California 9... 33.0200 -117.0800

4.5 Warehouses

ASML’s warehouses are categorized into central, regional, and local types, each serving distinct roles in the supply chain.

Central warehouses, are global distribution centers (GDCs) that hold large inventories of spare parts and service tools. They are responsible for:

  • Scheduled Replenishments: Regularly supplying local warehouses with spare parts and service tools to maintain optimal inventory levels.
  • Emergency Shipments: Executing urgent shipments when local warehouses run out of critical parts, ensuring rapid response to customer needs.

Regional warehouses, are regional distribution centers (RDCs) that act as intermediaries between central and local warehouses. They focus on:

  • Buffer Stock: Holding additional inventory to quickly replenish local warehouses and reduce lead times.
  • Geographical Coverage: Serving multiple local warehouses within a specific region to optimize logistics and distribution.

Local warehouses are field stocking locations (FSLs) that serve specific customer sites. They focus on:

  • Rapid Response: Providing quick access to spare parts and service tools for nearby customers, minimizing downtime.
  • Local Inventory Management: Maintaining optimal inventory levels at local warehouses to meet customer demand without delays.

Lateral Transhipments

Local warehouses are strategically located near major customer fabs to ensure fast delivery of critical parts. When a customer fab requires a spare part, the local warehouse checks its inventory and the inventory of nearby warehouses in the same region. If the part is available locally, it is shipped directly to the customer site. This is referred to as lateral transhipment. If the part is not available locally, it can be sourced from a central warehouse (i.e., GDC), which may involve air freight for critical components to meet service level agreements.

Table 4.5 shows the ASML warehouse information and Figure 4.4 illustrates the locations of ASML’s warehouses on a map, with colors indicating warehouse types and sizes based on their capacities.

Table 4.5: ASML premises’ locations with warehouse capacities (download).
Location_Name Address Latitude Longitude Region Warehouse_Type Warehouse_Capacity_m3 OrderProcessingTime_h SKU_Breadth Coverage_Days
Warehouse_ID
ASML-WH-41 ASML Linkou Factory No. 59, Keji 6th Rd., Hwa-Ya Technology Park, ... 25.0600 121.2200 APAC Central 106614 45 800 14
ASML-WH-42 ASML Tainan Factory No. 9, Dali 1st Rd., Xinshi Dist., Tainan City... 23.0900 120.3000 APAC Central 104381 45 800 14
ASML-WH-00 ASML Veldhoven (Global Headquarters) De Run 6501, 5504 DR, Veldhoven, The Netherlands 51.4167 5.4750 EMEA Central 101916 50 800 14
ASML-WH-02 ASML Crolles 127, Rue Marcel Reynaud, 38920, Crolles, France 45.2977 5.8980 EMEA Regional 22596 19 500 7
ASML-WH-13 ASML Beijing Ronghua Middle Road 19, 10F, Block B, Building... 39.9590 116.4620 APAC Regional 21986 25 500 7
ASML-WH-07 ASML Kiryat-Gat Mevo Sivan Street 1, 2F, 82021, Kiryat-Gat, Is... 31.6110 34.7660 EMEA Regional 21363 32 500 7
ASML-WH-52 ASML Lehi 4000 N Flash Drive, Building 20, c/o Texas Ins... 40.4300 -111.8800 Americas Regional 21272 26 500 7
ASML-WH-24 ASML Tokyo (Japan Headquarters) Kita Shinagawa 4-7-35, 4F, Gotenyama Trust Tow... 35.6250 139.7400 APAC Regional 21232 24 500 7
ASML-WH-20 ASML Wuxi Hefeng Road 26, Xinfa Huirong Plaza, 214028, W... 31.5500 120.3500 APAC Regional 20887 14 500 7
ASML-WH-30 ASML Yokkaichi Yasujima 2-1-15, Masuda Building, 510-0075, Yo... 34.9650 136.6200 APAC Regional 20660 27 500 7
ASML-WH-51 ASML Hillsboro 7451 NE Evergreen Parkway, Two Technology Buil... 45.5800 -122.9100 Americas Regional 19987 27 500 7
ASML-WH-03 ASML Berlin Waldkraiburger Straße 5, 12347, Berlin, Germany 52.4269 13.4899 EMEA Regional 19855 12 500 7
ASML-WH-45 ASML Boise 3130 S. Owyhee Street, Parkview Plaza, Boise, ... 43.5800 -116.2200 Americas Regional 19602 25 500 7
ASML-WH-39 ASML Pyeongtaek 4F~8F, 128 Dosijiwon-ro, Godeok-myeon, Pyeongt... 37.0400 127.1000 APAC Regional 19386 30 500 7
ASML-WH-57 ASML Silicon Valley 80 West Tasman, San Jose, California 95131, Un... 37.4100 -121.9500 Americas Regional 19362 23 500 7
ASML-WH-12 ASML Shanghai (Chinese mainland Headquarters) Jinke Road 2889, No1 Block A / No2 Block B, Ch... 31.1850 121.5870 APAC Regional 18945 27 500 7
ASML-WH-19 ASML Wuhan Gaoxin Avenue, 999, 12F, Building 3, Block C, ... 30.5800 114.2700 APAC Regional 18738 12 500 7
ASML-WH-54 ASML North Phoenix 25700 Norterra Dr, Phoenix, AZ 85085, United S... 33.7200 -112.1300 Americas Regional 17668 14 500 7
ASML-WH-59 ASML Wilton 77 Danbury Road, Wilton, Connecticut 06897, Un... 41.1900 -73.4300 Americas Regional 17609 15 500 7
ASML-WH-37 ASML Cheongju Unit #101, Ground Floor(1F), 141 Jinjae-ro, He... 36.6300 127.4500 APAC Regional 16086 18 500 7
ASML-WH-34 ASML Hwasung (South Korea Headquarters) 25 Samsung 1-ro 5-gil, Hwasung-si, Gyeonggi-do... 37.2000 127.0700 APAC Regional 15982 35 500 7
ASML-WH-53 ASML Manassas Innovation Drive, 9450, Ground Floor, Unit 1, ... 38.7500 -77.4700 Americas Regional 15801 27 500 7
ASML-WH-40 ASML Hsinchu (Taiwan Headquarters) 11F., No. 1, Sec. 3, Gongdao 5th Rd., East Dis... 24.8050 120.9750 APAC Regional 15431 29 500 7
ASML-WH-43 ASML Albany 255 Fuller Road, NanoFab South, Albany, New Yo... 42.6900 -73.8500 Americas Regional 14587 16 500 7
ASML-WH-10 ASML Delft Computerlaan 15, 2628 XK, Delft, The Netherlands 51.9990 4.3800 EMEA Regional 14303 18 500 7
ASML-WH-33 ASML Singapore 151 Lorong Chuan, New Tech Park #06-08, 556741... 1.3510 103.8650 APAC Regional 14297 14 500 7
ASML-WH-32 ASML Kulim Khtp Business Centre, 2F Suite 2.02, Kulim Hi-... 5.4000 100.5700 APAC Regional 13539 14 500 7
ASML-WH-44 ASML Austin 201 West Howard Lane, Suite 300, Austin, Texas... 30.4000 -97.6700 Americas Regional 12901 19 500 7
ASML-WH-38 ASML Icheon 866 Daewol-ro, Daewol-myeon, Icheon-si, Gyeong... 37.2300 127.4900 APAC Regional 11857 35 500 7
ASML-WH-25 ASML Hiroshima Saijo Okamachi 10-7, Higashi Hiroshima-shi, Hi... 34.4300 132.7500 APAC Regional 11308 15 500 7
ASML-WH-35 HMI Hwasung 9F, 6 Samsung 1-ro 5-gil, Hwasung-si, Gyeonggi... 37.2000 127.0700 APAC Regional 11221 33 500 7
ASML-WH-46 ASML Chandler 2625 West Geronimo Place, Chandler, Arizona 85... 33.3000 -111.8800 Americas Regional 10375 16 500 7
ASML-WH-36 Hwasung 2 (DUV, Cymer, LRC-2) 27 Dongtanchumdansanup 1-ro, Hwasung-si, Gyeon... 37.1900 127.0800 APAC Regional 10208 28 500 7
ASML-WH-08 ASML Migdal Ha'emek Ramat Gabriel Industry Area, 5 Africa Israel B... 32.6770 35.2400 EMEA Regional 10177 17 500 7
ASML-WH-56 ASML San Diego 17075 Thornmint Court, San Diego, California 9... 33.0200 -117.0800 Americas Regional 9947 12 500 7
ASML-WH-04 ASML Dresden Hermann-Reichelt-Straße 3a, 01109, Dresden, Ge... 51.0942 13.7810 EMEA Regional 9601 22 500 7
ASML-WH-27 ASML Kumamoto Carino Kikuyo 3F, 2422-4 Tsukure, Kikuyo-machi... 32.8600 130.7900 APAC Regional 8744 22 500 7
ASML-WH-48 ASML Dallas 870 North Dorothy Drive, Suite 706, Richardson... 32.9600 -96.7100 Americas Regional 8125 30 500 7
ASML-WH-05 ASML Erlangen Staudtstrasse 2, Max Planck Institut, 91058, E... 49.5950 11.0050 EMEA Local 2934 4 200 1
ASML-WH-22 ASML Xian Jin Ye Road 70, 6F, 710077, Xian, China 34.2000 108.8800 APAC Local 2920 6 200 1
ASML-WH-31 ASML Chitose Chitose Station Plaza 3F, 1789-3, Chiyoda-Cho ... 42.8200 141.6500 APAC Local 2912 5 200 1
ASML-WH-11 ASML Bellshill Grovewood Business Centre, Suite 51, ML4 3NQ, ... 55.8170 -4.0240 EMEA Local 2802 4 200 1
ASML-WH-23 HMI Beijing Liye Rd 8, International Information Park, Bei... 40.0400 116.3100 APAC Local 2711 3 200 1
ASML-WH-18 ASML Tianjin Race Course Road 59, 25F, Units 09, 10 & 11, P... 39.1350 117.2000 APAC Local 2534 3 200 1
ASML-WH-49 ASML Eagan 2020 Silver Bell Road, Suite 1, Eagan, Minneso... 44.8200 -93.2000 Americas Local 2424 9 200 1
ASML-WH-06 ASML Maynooth Maynooth Business Park, Block C Office, Ground... 53.3799 -6.5920 EMEA Local 2355 6 200 1
ASML-WH-29 ASML Tsuruoka 2-68 Nishiki-machi, Tsuruoka-shi, SS Building ... 38.7300 139.8300 APAC Local 2144 5 200 1
ASML-WH-50 ASML Fishkill 60 Merritt Boulevard, Suite 105, Fishkill, New... 41.5300 -73.9000 Americas Local 2095 6 200 1
ASML-WH-16 ASML Jinjiang Changxing Road 208, 22F, Minxing Fortune Cente... 24.8070 118.5780 APAC Local 1797 6 200 1
ASML-WH-58 HMI San Jose 80 West Tasman, San Jose, California 95131, Un... 37.4100 -121.9500 Americas Local 1571 5 200 1
ASML-WH-26 ASML Kitakami Iwate-Jisho Kitakami-Ekimae Bldg. 5F, 2-3-8 Od... 39.2860 141.1170 APAC Local 1560 8 200 1
ASML-WH-09 ASML Avezzano Piazzale J.F. Kennedy, Scala A - IV Piano Grou... 42.0280 13.4260 EMEA Local 1516 2 200 1
ASML-WH-14 ASML Dalian Yong De Street 1, 11F, Unit 9-13, Jinma Intern... 38.9140 121.6140 APAC Local 1497 9 200 1
ASML-WH-01 ASML Leuven Kapeldreef 75, B-3001, Leuven, Belgium 50.8798 4.7012 EMEA Local 1484 7 200 1
ASML-WH-21 ASML Xiamen Lianting Road 837, 5F, Unit 01 & 02, Xiamen, C... 24.4790 118.0890 APAC Local 1257 9 200 1
ASML-WH-15 ASML Hefei Chuangxin Avenue, Room 701, 702 & 802, Tower A... 31.8200 117.2300 APAC Local 913 8 200 1
ASML-WH-47 ASML Clifton Park 800 State Route 146, Suite 365, Town Plaza, Cl... 42.8700 -73.7800 Americas Local 839 10 200 1
ASML-WH-28 ASML Nagasaki Higashikouji-Machi 28-3, 4F, Room 401, Shigyo ... 32.7500 129.8700 APAC Local 716 5 200 1
ASML-WH-55 ASML Westbrook 590 County Road, Suite 1, Westbrook, ME 04092,... 43.6700 -70.3600 Americas Local 677 6 200 1
ASML-WH-17 ASML Nanjing Tuan Jie Road 99, 210001, Nanjing, China 32.0600 118.7960 APAC Local 472 10 200 1
Make this Notebook Trusted to load map: File -> Trust Notebook
Figure 4.4: ASML Warehouse Locations Map. The map shows the locations of ASML’s warehouses, with colors indicating warehouse types and sizes based on their capacities.

Table 4.6 summarizes the characteristics of ASML’s central, regional, and local warehouses, providing key parameters for each echelon.

  • Processing time (hours): administrative + pick/pack release only; transport lead time is separate.
  • Coverage target: how many days/weeks of regional/global demand the echelon is designed to buffer.
  • Typical stock: general guidelines on inventory types held at each echelon.
Table 4.6: Central, regional, and local warehouse characteristics.
Echelon Processing time (h) Coverage target Typical stock
Central (CWH) 24–72 6–12 wks global Slow movers; long-LT modules; high-value low-velocity items
Regional (RDC) 12–36 2–4 wks region Medium movers; regional critical sets; kits
Local (FSL) 2–12 1–3 days local Fast movers; high-criticality spares; service tools

4.6 Suppliers

ASML has a broad supplier network, with 85% of the parts in their machines produced by suppliers. They maintain long-term relationships and involve suppliers early in product development. The majority of suppliers are located in the Netherlands and EMEA1, with a growing presence in North America and Asia. Most supply chain investment is focused on around 200 “critical” suppliers (ASML 2025b). A critical supplier is, for example, Zeiss, which provides the projection optics for EUV machines (ZEISS 2024).

Table 4.7 provides a sample of ASML suppliers across different regions, highlighting their global presence. Figure 4.6 visualizes the geographic distribution of these suppliers on a world map, while Figure 4.5 illustrates the number of suppliers by country, emphasizing the concentration in specific regions.

Table 4.7: Sample of ASML suppliers around the world (download).
supplier_id country_code region longitude latitude
0 s-00001-NLD NLD Europe 4.353779 51.407881
1 s-00002-NLD NLD Europe 6.096683 52.635331
2 s-00003-NLD NLD Europe 3.415200 51.341911
3 s-00004-NLD NLD Europe 5.769638 52.278704
4 s-00005-NLD NLD Europe 6.358616 52.693362
Figure 4.5: Distribution of ASML suppliers by country and region.
Make this Notebook Trusted to load map: File -> Trust Notebook
Figure 4.6

4.7 Parts and Components

ASML machines are composed of several components, each made up of multiple parts. A component is called a FRU (Field Replaceable Unit) and is identified by a unique 12NC code (a 12-digit numeric code formatted as ‘XXXX.XXXX.XXXX’). Each component is supplied by a specific 1st-tier supplier. A supplier can provide multiple components, for example, that are used in different machine types. Components can be broken down into multiple parts, each also identified by a unique 12NC code. Each part has a quantity indicating how many of that part are needed to assemble one unit of the component. For example, the illumination system of the High-NA-EUV lithography consists of around 25,000 parts and weighs more than six tons, whereas the projection optics features 40,000 parts, weighs around twelve tons (ZEISS 2024). Among these parts, several are repeated multiple times within the same component (think of screws, bolts, etc.).

Table 4.8 shows a sample of parts used in different ASML machine types and their quantity per machine.

Table 4.8: Parts per ASML machine type and service area (download).
machine system qty_part
part_id
4030.5340.6162 PAS5500100D PAS 14
4030.5340.6162 PAS5500275D PAS 1
4030.5340.6162 PAS5500750F PAS 14
4030.5340.6162 PAS5500850C PAS 6
4030.5340.6162 PAS5500350C PAS 12
4030.5340.6162 PAS55001150C PAS 7
4030.5340.6162 TWINSCANXT860N NXT 4
4030.5340.6162 TWINSCANNXT870 NXT 11
4030.5340.6162 TWINSCANXT860M NXT 8
4030.5340.6162 NXT2150i NXT 4

Table 4.9 shows a sample of parts and their associated suppliers.

Table 4.9: Parts associated with ASML’s core suppliers (download).
supplier_id
part_id
4030.5340.6162 s-00186-USA
4030.2590.1807 s-00099-DEU
4030.8510.0370 s-00176-CHE
4030.2839.0813 s-00021-NLD
4030.2658.6691 s-00092-DEU
4030.8775.2124 s-00151-ITA
4030.2829.8141 s-00167-BEL
4030.0374.0545 s-00124-DEU
4030.2450.3347 s-00098-DEU
4030.9451.7311 s-00095-DEU

A supplier, however, does not provide parts separately but rather as part of a component. Table 4.10 shows a sample of components and their associated parts.

Table 4.10: Components and their associated parts (download).
part_id supplier_id
component_id
4030.460.534 4030.9872.0119 s-00001-NLD
4030.460.534 4030.7342.1240 s-00001-NLD
4030.460.534 4030.0964.0202 s-00001-NLD
4030.460.534 4030.0602.0093 s-00001-NLD
4030.460.534 4030.7076.6847 s-00001-NLD
4030.460.534 4030.2545.6946 s-00001-NLD
4030.460.534 4030.7632.3479 s-00001-NLD
4030.460.534 4030.7178.5169 s-00001-NLD
4030.460.534 4030.3818.3764 s-00001-NLD
4030.460.534 4030.6722.5832 s-00001-NLD

A total of 5,400 components are used across 27 machines, made up of 200,212 unique parts supplied by ASML’s 200 suppliers.

Creating a component requires substantial effort from suppliers and is associated with a lead time. The lead time for each component is detailed in Table 4.11. Furthermore, each supplier has a limited “work in progress” (WIP) capacity, which represents the maximum number of components they can handle simultaneously. Table 4.12 provides an overview of suppliers and their respective WIP capacities. Therefore, if a supplier is already at full WIP capacity, any new orders for components from that supplier will experience delays until capacity becomes available.

Table 4.11: Components and their lead times (download).
supplier_id lead_time_weeks
component_id
4030.460.534 s-00001-NLD 8
4030.013.182 s-00002-NLD 13
4030.806.484 s-00003-NLD 10
4030.122.072 s-00004-NLD 9
4030.989.805 s-00005-NLD 6
4030.480.835 s-00006-NLD 6
4030.910.243 s-00007-NLD 5
4030.164.180 s-00008-NLD 12
4030.821.703 s-00009-NLD 9
4030.034.101 s-00010-NLD 10
Table 4.12: Components and their suppliers’ work-in-progress capacity (download).
wip_capacity
supplier_id
s-00001-NLD 4
s-00002-NLD 6
s-00003-NLD 5
s-00004-NLD 1
s-00005-NLD 7
s-00006-NLD 8
s-00007-NLD 4
s-00008-NLD 4
s-00009-NLD 3
s-00010-NLD 4

4.8 Machine Order History

Since ASML machines are highly specialized and expensive, they are ordered well in advance. The order history captures the timeline from order placement to machine delivery and installation. This includes the manufacturing, assembly, and shipping processes, which can take several months. Table 4.13 shows a sample of the order history of ASML machines across various customer sites.

The dataset includes the following columns:

  • Customer: The customer that ordered the machine.
  • Fab: The fabrication plant (fab) where the machine is installed.
  • Count: The number of machines of a specific model ordered by the customer.
  • Order_Date: The date when the order was placed.
  • Delivery_Date: The date agreed for delivery of the machine.
  • Machine_Model: The model of the ASML machine ordered.

Figure 4.7 illustrates the distribution of machine orders over the years, showing the uptake of different machine types (e.g., EUV, DUV) and the growth of ASML’s customer base. In total, ASML has sold 15,406 machines.

The number of machines ordered by the top 10 customers is shown in Figure 4.8, which highlights the concentration of orders among a few key customers. The top three customers account for about 58% of all machines sold.

Table 4.13: Machine deployment history. All machines deployed are still in operation, with some being older models that have been retrofitted with updated in hardware and software (download).
Customer_ID Fab_ID Machine_Model Count Order_Date Delivery_Date
Order_ID
000003219950527 C000-TSMC TSMC-ARI-US PAS5500350C 5 1995-05-27 1996-07-17
000003419951114 C000-TSMC TSMC-ARI-US PAS5500100D 5 1995-11-14 1996-10-04
000003319951214 C000-TSMC TSMC-ARI-US PAS5500350C 5 1995-12-14 1996-05-18
000006019960325 C000-TSMC TSMC-ARI-US PAS5500275D 4 1996-03-25 1997-10-06
000009019970527 C000-TSMC TSMC-ARI-US PAS5500275D 4 1997-05-27 1998-04-10
... ... ... ... ... ... ...
000216820221016 C030-VI VI-SIN-SG TWINSCANNXE3400C 4 2022-10-16 2023-05-21
000228420240201 C030-VI VI-SIN-SG NXT2150i 4 2024-02-01 2024-09-17
000241720240417 C030-VI VI-SIN-SG PAS5500100D 5 2024-04-17 2025-12-28
000228620240421 C030-VI VI-SIN-SG TWINSCANNXE3600D 4 2024-04-21 2024-05-15
000241420240818 C030-VI VI-SIN-SG TWINSCANNXT870B 5 2024-08-18 2025-12-16

4743 rows × 6 columns

Figure 4.7: Number of ASML machines per type over the years.
Figure 4.8: Number of machines ordered by the top 10 customers. The stacked bar chart shows the number of machines ordered by each customer, with colors indicating different machine types.

4.9 Customer Fabrication Plants (Fabs)

ASML’s customers operate fabrication plants (fabs) where lithography machines are installed. These fabs are located globally, with a concentration in regions like Taiwan, South Korea, the United States, and Europe. Each fab has a unique identifier and is associated with specific machine models. The dataset includes details such as fab location, customer name, and installed machine models. Table Table 4.14 shows a sample of fabs operated by ASML’s customers.

Table 4.14: Sample fabs operated by ASML’s customers (download).
Customer Fab_Location Latitude Longitude
Fab_ID
ACD-KAO-TW AsiaChip Dynamics Kaohsiung, Taiwan 22.6200 120.3100
CCI-PEN-MY ChipCore Industries Penang, Malaysia 5.4000 100.5700
CWS-TOU-FR ChipWave Solutions Toulouse, France 43.6040 1.4440
FCT-JUR-SG FabCore Technologies Jurong, Singapore 1.3510 103.8650
GCC-AUS-US GlobalChip Corp Austin, Texas, United States 30.4000 -97.6700
GF-SIN-SG GlobalFoundries Singapore 1.3510 103.8650
GF-MAL-US GlobalFoundries Malta, New York, United States 42.9700 -73.7900
GF-DRE-DE GlobalFoundries Dresden, Germany 51.0942 13.7810
IT-REG-DE Infineon Technologies Regensburg, Germany 49.0150 12.0950
IT-VIL-AT Infineon Technologies Villach, Austria 46.6100 13.8500
I-LEI-IE Intel Leixlip, Ireland 53.3799 -6.5920
I-KIR-IL Intel Kiryat Gat, Israel 31.6110 34.7660
I-HIL-US Intel Hillsboro, Oregon, United States 45.5800 -122.9100
I-CHA-US Intel Chandler, Arizona, United States 33.3000 -111.8800
K-YOK-JP Kioxia Yokkaichi, Japan 34.9650 136.6200
K-KIT-JP Kioxia Kitakami, Japan 39.2860 141.1170
MFI-TOK-JP MicroFab Innovations Tokyo, Japan 35.6250 139.7400
M-BOI-US Micron Boise, Idaho, United States 43.5800 -116.2200
M-HIR-JP Micron Hiroshima, Japan 34.4300 132.7500
M-SIN-SG Micron Singapore 1.3510 103.8650
NXPS-EIN-NL NXP Semiconductors Eindhoven, Netherlands 51.4167 5.4750
NXPS-SIN-SG NXP Semiconductors Singapore 1.3510 103.8650
NFT-SUZ-CN NanoFab Technologies Suzhou, China 31.2990 120.5850
NTS-HAI-IL NanoTech Systems Haifa, Israel 32.7940 34.9890
RE-NAK-JP Renesas Electronics Naka, Japan 36.3800 140.4700
RE-SAI-JP Renesas Electronics Saijo, Japan 34.4300 132.7500
SKH-WUX-CN SK Hynix Wuxi, China 31.5500 120.3500
SKH-ICH-KR SK Hynix Icheon, South Korea 37.2300 127.4900
SMIC-SHA-CN SMIC Shanghai, China 31.1850 121.5870
SMIC-BEI-CN SMIC Beijing, China 39.9590 116.4620
STM-AGR-IT STMicroelectronics Agrate Brianza, Italy 45.5500 9.3500
STM-CRO-FR STMicroelectronics Crolles, France 45.2977 5.8980
STM-SIN-SG STMicroelectronics Singapore 1.3510 103.8650
S-HWA-KR Samsung Hwaseong, South Korea 37.2000 127.0700
S-PYE-KR Samsung Pyeongtaek, South Korea 37.0400 127.1000
S-AUS-US Samsung Austin, United States 30.4000 -97.6700
SNT-MUN-DE SemiNova Tech Munich, Germany 48.1370 11.5750
STS-SIN-SG SemiTech Solutions Singapore 1.3510 103.8650
SEC-SAN-US SiliconEdge Corp San Jose, California, United States 37.4100 -121.9500
TSMC-HSI-TW TSMC Hsinchu, Taiwan 24.8050 120.9750
TSMC-TAI-TW TSMC Tainan, Taiwan 23.0900 120.3000
TSMC-KUM-JP TSMC Kumamoto, Japan 32.8600 130.7900
TSMC-ARI-US TSMC Arizona, United States 33.7200 -112.1300
TCI-SUW-KR TechChip Innovations Suwon, South Korea 37.2600 127.0300
TTS-YON-KR TechTrend Semiconductors Yongin, South Korea 37.2300 127.2000
TI-DAL-US Texas Instruments Dallas, Texas, United States 32.9600 -96.7100
TI-RIC-US Texas Instruments Richardson, Texas, United States 32.9600 -96.7100
TI-FRE-DE Texas Instruments Freising, Germany 48.4020 11.7480
TS-NEW-US Tower Semiconductor Newport Beach, United States 33.6200 -117.9300
TS-MIG-IL Tower Semiconductor Migdal Haemek, Israel 32.6770 35.2400
UMC-SIN-SG UMC Singapore 1.3510 103.8650
UMC-HSI-TW UMC Hsinchu, Taiwan 24.8050 120.9750
VI-HSI-TW Vanguard International Hsinchu, Taiwan 24.8050 120.9750
VI-SIN-SG Vanguard International Singapore 1.3510 103.8650
WD-YOK-JP Western Digital Yokkaichi, Japan 34.9650 136.6200
WD-FRE-US Western Digital Fremont, California, United States 37.4100 -121.9500
XFSF-KUC-MY X-Fab Silicon Foundries Kuching, Malaysia 1.5570 110.3590
XFSF-ERF-DE X-Fab Silicon Foundries Erfurt, Germany 50.9787 11.0328
Make this Notebook Trusted to load map: File -> Trust Notebook
Figure 4.9: Fabs operated by ASML’s customers on a map. The map shows the locations of customer fabs, with markers indicating the number of machines installed.

4.10 Returnable Transport Materials (RTMs)

ASML’s global semiconductor equipment operations require sophisticated logistics to transport highly sensitive and valuable components across continents. The company employs Returnable Transport Materials (RTMs)—specialized packaging systems designed for multiple use cycles to optimize costs and environmental impact.

The RTMs are transhipped across ASML’s warehouse network so that parts can be efficiently routed from suppliers to manufacturing sites and ultimately to customers. Each RTM type is engineered to accommodate specific part size classes, ensuring optimal protection and handling during transit.

Table 4.15 summarizes the key parameters of ASML’s RTM systems, which are categorized based on the size of parts they handle:

  • Identity and classification:
    • rtm_id: Unique identifier for tracking individual RTM units.
    • rtm_name: Descriptive name of the RTM type.
    • description: Explanation of the RTM’s purpose and applications.
    • applicable_size_classes: List of part size classes (e.g., XS, S, M, L, XL, XXL) that can use this RTM.
      • Small Components (XS/S): Micro-totes and cassettes for high-volume, frequent-use.
      • Medium Components (M/L): Flight cases and crates for precision instruments.
      • Large Components (XL/XXL): Specialized systems for major subsystems and complete modules.
  • Physical parameters:
    • footprint_m2: Storage footprint in square meters.
    • chargeable_weight_kg: Weight used by air freight carriers for cost calculation.
  • Economic parameters:
    • price_new_eur: Purchase price for a new RTM unit.
    • rtm_holding_cost_per_day: Daily carrying cost while RTM is in inventory.
    • cleaning_cost_per_cycle: Cost to clean and prepare RTM for reuse.
    • repair_cost_per_cycle: Average repair and maintenance cost per use cycle.
    • disposal_cost_eur: Cost incurred when RTM reaches end-of-life.
    • backorder_cost_per_day: Penalty cost for each day an RTM is unavailable.
    • monitoring_fee_per_shipment: Cost for tracking and shipment visibility services.
  • Operational parameters:
    • lead_time_new_days: Lead time in days to procure a new RTM and deliver it to the central warehouse in Veldhoven.
    • lead_time_clean_days: Lead time in days to clean an RTM to service.
    • max_cycles: Maximum number of use cycles before mandatory disposal.
  • Technical specifications:
    • esd: Indicates electrostatic discharge protection capability.
    • cleanroom: Indicates cleanroom compatibility.
Table 4.15: Key parameters of ASML’s RTM systems categorized by part size class (download).
rtm_name description applicable_size_classes footprint_m2 chargeable_weight_kg price_new_eur rtm_holding_cost_per_day cleaning_cost_per_cycle repair_cost_per_cycle disposal_cost_eur backorder_cost_per_day monitoring_fee_per_shipment max_cycles lead_time_new_days lead_time_clean_days esd cleanroom
rtm_id
RTM_001 ESD micro-tote (cleanroom) Small ESD-safe tote for delicate electronic co... S,XS 0.06 1.2 45.0 0.15 2.0 3.5 8.0 12.0 0.0 200 14 3 True True
RTM_002 Micro cassette / divider tray (cleanroom) Precision cassette for wafer handling components S,XS 0.04 0.8 35.0 0.12 2.5 4.0 6.0 15.0 0.0 150 10 2 False True
RTM_003 Returnable modular crate Standard modular shipping crate for medium com... M,S 0.25 8.5 120.0 0.30 1.5 8.0 25.0 35.0 0.0 300 7 1 False False
RTM_004 Cleanroom tote (ESD-safe) ESD-safe cleanroom tote for sensitive optical ... M,S 0.36 12.0 185.0 0.35 3.0 12.0 40.0 55.0 0.0 250 21 4 True True
RTM_005 Reusable flight case Shock-resistant flight case for precision inst... M 0.48 25.0 340.0 0.60 1.0 18.0 75.0 85.0 5.0 180 35 2 False False
RTM_006 Shock/tilt monitored crate IoT-enabled crate with shock and tilt monitoring L,M 0.64 35.0 580.0 0.80 1.0 35.0 120.0 150.0 12.0 120 45 5 False False
RTM_007 Pallet + cage (stillage) Heavy-duty pallet with protective cage structure L 1.20 45.0 280.0 0.40 0.0 25.0 85.0 75.0 4.0 400 21 1 False False
RTM_008 Industrial freight container (ESD-safe) Large ESD-safe container for major subsystems L,XL 2.40 85.0 1200.0 1.50 8.0 75.0 250.0 300.0 25.0 150 60 7 True True
RTM_009 Climate-controlled shipping module Temperature/humidity controlled module for optics XL 3.60 160.0 2800.0 2.80 15.0 180.0 450.0 750.0 50.0 100 90 10 True True
RTM_010 Heavy-duty transport frame (vibration-isolated) Vibration-isolated frame for precision mechani... XL,XXL 4.80 280.0 4500.0 4.20 25.0 350.0 850.0 1200.0 100.0 80 120 14 True True
RTM_011 Multi-modal shipping system (air/truck/crane) Complete logistics system for EXE:5000 modules... XXL 8.00 650.0 12000.0 8.50 50.0 800.0 2200.0 2500.0 250.0 60 180 21 True True

4.11 Transportation Requirements for ASML Machines

Transporting ASML machines requires a significant number of crates and freight containers due to their size and complexity. The exact number can vary based on the machine type and configuration. For example, transporting the TWINSCAN EXE:5000 system involves more than 250 crates and 43 freight containers (Intel Newsroom 2024).

Figure 4.10: ASML team shipping TWINSCAN EXE:5000 to Intel (TweakTown 2023)

Table 4.16 shows the estimated number of crates and freight containers needed for different ASML machine types based on their volumes.

Table 4.16: Number of crates and freight containers needed to ship ASML machine types.
n_crates n_containers
type
EXE 250 43
NXE 280 49
NXT 120 21
PAS 46 8

4.12 Carrier Profiles and Transportation Lanes

ASML leverages transportation to connect its multi-echelon network to customer fabs by aligning urgency, value-at-risk, and distance with the most suitable mode × carrier combination. The analysis focuses on three key decision factors: (1) cost, represented as €/kg; (2) time, encompassing transport lead time derived from fixed terminal handling, mode-specific line-haul speeds, and additional schedule/customs buffers; and (3) reliability, reflecting the on-time probability critical for meeting SLAs and avoiding costly downtime penalties.

Table 4.17 provides region-to-region transportation tariffs per mode with €/kg and €/m³ (air volumetric, 167 kg/m³). The columns are:

  • Region_1: The origin region (EMEA, Americas, APAC).
  • Region_2: The destination region (EMEA, Americas, APAC).
  • Mode: The transportation mode (air, ground, sea).
  • EUR_per_kg: The expected price per kilogram for the mode and region pair
  • EUR_per_m3_at_167: The expected price per cubic meter for air mode using the IATA volumetric rule (167 kg/m³). Not applicable for ground and sea modes.
Table 4.17: Region-to-region transportation tariffs per mode with €/kg and €/m³ (air volumetric, 167 kg/m³). (download).
EUR_per_kg
Region_1 Region_2 Mode
EMEA EMEA air 16.14
ground 2.26
sea 0.82
Americas air 19.52
sea 0.99
APAC air 19.76
sea 0.92
Americas EMEA air 19.38
sea 0.91
Americas air 16.14
ground 2.26
sea 0.82
APAC air 19.71
sea 0.92
APAC EMEA air 20.86
sea 0.96
Americas air 20.10
sea 0.96
APAC air 16.14
ground 2.26
sea 0.82

Table 4.18 presents mode speeds, fixed handling times, and service buffers. The columns are:

  • Mode: The transportation mode (air, ground, sea).
  • Linehaul_Speed_kmh: The indicative average hub-to-hub speed in kilometers per hour used for conceptual transit reasoning2.
  • Fixed_Terminal_days: The typical handling time at terminals (handover, staging, cut-off effects) before line-haul starts, expressed in days.
  • Sched_Wait_days_min / Sched_Wait_days_max: A range for additional schedule wait (e.g., sailing day for sea, flight bank for air).
  • Customs_days_min / Customs_days_max: A range for customs clearance variability (export/import), in days.
  • OnTimeRate_mean: The expected on-time probability (mode-level).
Table 4.18: Mode speeds, fixed handling times, and service buffers. (download).
Linehaul_Speed_kmh Fixed_Terminal_days Sched_Wait_days_min Sched_Wait_days_max Customs_days_min Customs_days_max OnTimeRate_mean
Mode
air 825.0 1.01 0.1 0.5 0.0 1.0 0.887
ground 63.0 0.84 0.1 0.2 0.0 0.2 0.826
sea 33.0 5.00 0.0 7.0 0.0 3.0 0.599

Table 4.19 presents carrier profiles with the following columns:

  • Carrier: The logistics provider (e.g., DHL, FedEx, UPS, Maersk, DB Schenker).
  • Mode: The mode that carrier provides in this dataset (air, ground, or sea).
  • EUR_per_kg_intra: The expected price per kilogram for intra-region moves for this carrier × mode.
  • Speed_kmh_effective: The carrier’s indicative line-haul speed for that mode.
  • OnTimeRate: The expected on-time probability for this carrier × mode, aligned with mode-level reliability priors.
Table 4.19: Carrier snapshots with resolved €/kg, speeds, and on-time rates. (download).
EUR_per_kg_intra Speed_kmh_effective OnTimeRate
Carrier Mode
DHL air 16.71 741 0.887
ground 2.15 63 0.826
sea 0.82 33 0.599
FedEx air 15.57 748 0.887
ground 2.25 63 0.826
UPS air 16.90 726 0.887
ground 2.39 63 0.826
Maersk sea 0.86 33 0.599
DB Schenker air 14.36 755 0.887
ground 2.28 63 0.826
sea 0.82 33 0.599

What is the rationale for on-time and damage rates? ASML’s logistics network is designed to balance speed, cost, and reliability. The on-time rates reflect the carriers’ performance in meeting delivery schedules, which is crucial for minimizing downtime at customer fabs. Damage rates are included to account for the risk of part damage during transit, which can lead to additional costs and delays. Delays can be particularly costly for ASML, as they may lead to extended machine downtimes at customer sites, impacting production schedules and customer satisfaction.

4.13 Service Level Agreements (SLAs)

In chip manufacturing, uptime is critical. ASML offers various Service Level Agreements (SLAs) to its customers, defining the expected performance and availability of their lithography systems. These SLAs typically include:

  • Availability Guarantees: Commitments to ensure that systems are operational and available for use a certain percentage of the time.
  • Response Times: Defined timeframes within which ASML will respond to service requests or issues.

Table 4.20 provides an overview of typical SLA parameters for ASML lithography systems.

Table 4.20: Typical SLA parameters for ASML lithography systems.
SLA Level Availability (%) Max Downtime (hours/year) Response Time (hours)
Basic 95 438 24
Standard 98 175 12
Premium 99.5 44 4

The top 20% of customers are Premium, the next 50% are Standard, and the rest are Basic.

When SLAs are violated, ASML faces penalties. Table 4.21 outlines the penalty structure for SLA violations.

Table 4.21: Penalties incurred by ASML for SLA violations.
Violation Type Fixed Penalty (€) Penalty per Hour (€)
Downtime due to missing spare parts 500 100
Downtime due to missing service tools 250 50

4.14 References

ASML. 2025a. “ASML Products & Services: Supplying the Semiconductor Industry.” ASML. 2025. https://www.asml.com/en/products.
———. 2025b. “Sourcing & Supply Chain – Teams at ASML.” ASML. 2025. https://www.asml.com/en/careers/teams/sourcing-and-supply-chain.
“ASML EUV Lithography Systems.” 2025. ASML. 2025. https://www.asml.com/en/products/euv-lithography-systems.
Bloomberg News. 2024. “ASML Shows Off $380M, 165-Ton Machine Behind AI Shift,” February 13, 2024. https://www.datacenterknowledge.com/ai-data-centers/asml-shows-off-380m-165-ton-machine-behind-ai-shift.
Intel Newsroom. 2024. “With High NA EUV, Intel Foundry Opens New Frontier in Chipmaking.” April 18, 2024. https://newsroom.intel.com/intel-foundry/intel-foundry-opens-new-frontier-chipmaking.
LaPedus, Mark. 2016. “Why EUV Is So Difficult.” Semiconductor Engineering. November 17, 2016. https://semiengineering.com/why-euv-is-so-difficult/.
Mat Honanarchive, and James O’Donnellarchive. 2024. “How ASML Took over the Chipmaking Chessboard.” MIT Technology Review. January 4, 2024. https://www.technologyreview.com/2024/04/01/1090393/how-asml-took-over-the-chipmaking-chessboard/.
“NXT:1980Fi.” 2016. ASML. 2016. https://www.asml.com/en/products/duv-lithography-systems/twinscan-nxt1980fi.
“NXT:2100i.” 2017. ASML. 2017. https://www.asml.com/en/products/duv-lithography-systems/twinscan-nxt2100i.
“NXT:2150i.” 2018. ASML. 2018. https://www.asml.com/en/products/duv-lithography-systems/twinscan-nxt-2150i.
PAS 5500/100D. 2019. Manual. ASML. https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/files/products/refurbished-products/pas-5500-100d.pdf.
PAS 5500/1150C. 2019. Manual. ASML. https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/files/products/refurbished-products/pas-5500-1150c.pdf.
PAS 5500/275D. 2019. Manual. ASML. https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/files/products/refurbished-products/pas-5500-275d.pdf.
PAS 5500/350C. 2019. Manual. ASML. https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/files/products/refurbished-products/pas-5500-350c.pdf.
PAS 5500/450F. 2019. Manual. ASML. https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/files/products/refurbished-products/pas-5500-450f.pdf.
PAS 5500/750F. 2019. Manual. ASML. https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/files/products/refurbished-products/pas-5500-750f.pdf.
PAS 5500/850C. 2019. Manual. ASML. https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/files/products/refurbished-products/pas-5500-850c.pdf.
PAS 5500/8TFH-a. 2019. Manual. ASML. https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/files/products/refurbished-products/pas-5500-8tfh-a.pdf.
“Refurbished Systems.” 2025. ASML. ASML. 2025. https://www.asml.com/en/products/refurbished-systems.
Tarasov, Katie. 2022. “ASML Is the Only Company Making the $200 Million Machines Needed to Print Every Advanced Microchip. Here’s an Inside Look.” CNBC: Technology, March 23, 2022. https://www.cnbc.com/2022/03/23/inside-asml-the-company-advanced-chipmakers-use-for-euv-lithography.html.
———. 2025. “Exclusive Look at the Creation of High NA, ASML’s New $400 Million Chipmaking Colossus.” CNBC. May 22, 2025. https://www.cnbc.com/2025/05/22/exclusive-look-at-high-na-asmls-new-400-million-chipmaking-colossus.html.
TweakTown. 2023. “ASML Ships Industry’s First High-NA EUV Lithography Scanner to Intel.” TweakTown. December 22, 2023. https://www.tweaktown.com/news/95120/asml-ships-industrys-first-high-na-euv-lithography-scanner-to-intel/index.html.
“TWINSCAN EXE:5000.” 2024. ASML. 2024. https://www.asml.com/en/products/euv-lithography-systems/twinscan-exe-5000.
“TWINSCAN EXE:5200B.” 2025. ASML. 2025. https://www.asml.com/en/products/euv-lithography-systems/twinscan-exe-5200b.
“TWINSCAN NXE:3400B.” 2017. ASML. 2017. https://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe3400b.
“TWINSCAN NXE:3400C.” 2019. ASML. 2019. https://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe3400c.
“TWINSCAN NXE:3600D.” 2021. ASML. 2021. https://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe-3600d.
“TWINSCAN NXE:3800E.” 2024. ASML. 2024. https://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe-3800e.
“TWINSCAN NXT:1470.” 2013. ASML. 2013. https://www.asml.com/en/products/duv-lithography-systems/twinscan-nxt1470.
“TWINSCAN NXT:2000i.” 2015. 2015. https://www.asml.com/en/products/duv-lithography-systems/twinscan-nxt2000i.
“TWINSCAN NXT:2050i.” 2019. ASML. 2019. https://www.asml.com/en/products/duv-lithography-systems/twinscan-nxt2050i.
“TWINSCAN NXT:870.” 2022. ASML. 2022. https://www.asml.com/en/products/duv-lithography-systems/twinscan-nxt870.
“TWINSCAN NXT:870B.” 2022. ASML. 2022. https://www.asml.com/en/products/duv-lithography-systems/twinscan-nxt-870b.
“TWINSCAN XT:1060K.” 2006. ASML. 2006. https://www.asml.com/en/products/duv-lithography-systems/twinscan-xt-1060k.
“TWINSCAN XT:1460K.” 2008. ASML. 2008. https://www.asml.com/en/products/duv-lithography-systems/twinscan-xt1460k.
“TWINSCAN XT:400M.” 2025. ASML. 2025. https://www.asml.com/en/products/duv-lithography-systems/twinscan-xt-400m.
“TWINSCAN XT:860M.” 2021. ASML. 2021. https://www.asml.com/en/products/duv-lithography-systems/twinscan-xt-860m.
“TWINSCAN XT:860N.” 2021. ASML. 2021. https://www.asml.com/en/products/duv-lithography-systems/twinscan-xt860n.
ZEISS. 2024. “High-NA-EUV: New Technology for Global Microchip Production.” Manufacturer Website. ZEISS. January 30, 2024. https://www.zeiss.com/semiconductor-manufacturing-technology/news-and-events/smt-press-releases/2024/high-na-euv-lithography.html.

  1. EMEA = Europe, Middle East, and Africa↩︎

  2. Line-haul refers to the main segment of transportation between major hubs or terminals, excluding local pickups and deliveries. It is called “line-haul” because it typically involves long-distance travel along established routes or “lines.”↩︎